テクノロジー
Chinese chipmaking tools vendor Kingsemi launched a new generation of its wafer coating and developing machine the FT (III) 300 on Dec. 17. The machine adopts a symmetrical design, with 36 spin processing units. The machine is capable of 300 slices per hour and can be upgraded to 48 spin processing units to achieve greater productivity. Kingsemi claimed that its machine is compatible with mainstream photolithography technology, including KrF, ArF dry, and ArF. Founded in 2002 by a Shenyang-based subsidiary of the Chinese Academy of Sciences, Kingsemi focuses on research and development for semiconductor manufacturing equipment. It was listed in Shanghai in 2019.[[Kingsemi, in Chinese]
